Over many years, RF-MEMS have been a hot topic in research at the technology
and device level. In particular, various kinds of mechanical Si-MEMS resonators
and piezoelectric BAW (bulk acoustic wave) resonators have been developed. The
BAW technology has made its way to commercial products for passi ...
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标签：
MEMS-based
Circuits
Systems
and
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2020-06-06
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