Micro-Electro-Mechanical Systems (MEMS) are miniature systems composed
ofintegratedelectricalandmechanicalpartstosenseand/orcontrolthingsonaµmscale.
The concept of MEMS is attributed to Richard Feynman’s famous talk on December
29th, 1959 [2,3]. Dr. Feynman foresaw many aspects of future MEMS deve ...
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MEMS
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2020-06-06
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